
Anchor-induced localized stress evolution and deformation prediction in SOI MEMS structures
<a href="https://news.google.com/rss/articles/CBMiX0FVX3lxTFBtSzAxcXBQdU5tVHlNUy1UMzdiREJPXzhyX3dxcFM3aUk0R3RxZTMxbzloUk5VX3liQVpQTUk5c1dxX2NrTWVsZ2hMT0tIMlU0VFlvanR4cDFFQS1SMEJj?oc=5" target="_blank">Anchor-induced localized stress evolution and deformation prediction in SOI MEMS structures</a>&nbsp;&nbsp;<font color="#6f6f6f">Nature</font>

